​​​​​​​​​​​东莞市瀚基智能科技有限公司

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​HIST Technology Co.,LTD.
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Smart 


  Wafer  


 Sorter


东莞瀚基智能科技有限公司成立于2021年，主营高端智能客制化设备、生物科技产业自动化设备、集成电路厂自动搬运设备、晶圆厂芯片自动装卸搬运设备，是一家集研发、制造、销售于一体的智能科技公司，以建立世界级品牌成为同类型设备全品牌为公司首要目标。

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Hanji Semiconductor Technology Ltd., established in 2021, is a technical innovation enterprise that professionally works on research and development, manufacturing, and sales together. Our prospected aim is to become a global leading brand of products. HIST specializes in high-end intelligent customized equipment, biotechnology automation, integrated circuits automatic transit machine, and wafer automatic loading/unloading facilities.

重要的核心技术就是影像瑕疵检测系统。影像辨识系统分为三种类型，第一种是透过影像实时鉴测Wafer在吸附移动时，所产生的偏移量，确保在放置检测站时在中心点顺利放下，以进行质量辨识。第二种是OCR光学影像检测系统，透过字型辨识学习方式记录样式，并比对字型，来完成OCR算法辨识能力。第三种是Wafer影像检测系统，可检测Wafer边缘破损、缺角等边缘表面瑕疵检测，影像进行取样及结合深度学习方式加以辨识，使其能够辨识异音或故障的种类，并根据检测结果透过计算机纪录数据，这对于提升产线检测与可靠度能力，将大有助益。

Another significant core technology of Smart Wafer Sorter is the visual inspection system. There are three main types of recognition systems. The first one is to identify the offset generated by the wafer during the adsorption movement in real-time through the image, the second one uses the OCR vision system to provide a pre-alignment or rough alignment of the wafer, and the third visual inspection uses the deep learning AI algorithm, which allows it to detect, identify defects such as surface warpage, breakage, and unusual sound. All of these detected flaws will be recorded in computers, which can be used to improve the reliability of manufacturing.


晶圆选别机其中的采智能型晶圆夹持机构，是利用氣旋原理进行晶圆片吸附与夹持，

達到非接触悬浮目的，夹持避免吸盘与晶圆表面接触，可以做到完全避免污染晶圆，是全球首创的技术。除了能避免污染晶圆，采智能型晶圆夹持机构还能感知相关位置，避免运送过程进行碰撞，防止吸盘碰撞原片导致破片。除此之外，采智能型晶圆夹持机构搭配的控制系统具有感知功能，达到节省能源、提升效率的多重效果。

Breeze Wafer Handling System, the world's first tornado Principle-based Intelligent non-contact suction chucks, can be levitated and transport the wafer via airflow. The non-contact suction holding technology, alongside the motion-sensing capabilities, allows wafers to be conveyed with minimal peripheral contact. This not only eliminates possible wafer scratches and damage, but also provides the advantages of high precision, efficiency, and impressive energy savings. In addition, the OCR system is capable of reading the laser markings on wafers, creating a database, and automatically stacking and sorting them in cassettes.